3D80-00006-V1 pneumatic slit valve

Model:3D80-000006-V1
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

3D80-00006-V1 pneumatic slit valve

Product manual:

3D80-00006-V1 V-Tex roller type pneumatic slit valve, semiconductor vacuum chamber isolation gate, cylinder driven opening and closing, reliable vacuum sealing, with the following characteristics:
1. 3D80-00006-V1 integrated valve assembly, equipment chamber flange can be directly disassembled and replaced
2. Pneumatic roller cam drive, smooth switch action, extremely low dust production, suitable for dust-free workshops
3. Special sealing rubber ring, completely isolating high and low vacuum chambers after closing, with low leakage rate
4. Built in position sensing switch, feedback gate fully open/fully closed signal to equipment PLC
5. Cylinder with buffer structure, switch without impact, reducing the risk of wafer vibration
6. The metal valve body is corrosion-resistant and resistant to corrosive gases from etching and coating processes
7. Narrow and compact shape, suitable for small installation spaces in chambers and transmission compartments
8. Standardized flange interface, with new and old valve bodies of the same model directly interchangeable without changing the pipeline
9. Mechanical locking structure, the gate remains in its current state after gas interruption to prevent vacuum leakage
10. Easy disassembly and assembly of seals, convenient daily maintenance and replacement of sealing rings
11. All metal shielding structure, not affected by cavity RF electromagnetic interference
12. Long cycle life, meeting the continuous operation of 7 × 24 hours on the production line
13. Adapt to inert process gases, high and low vacuum pressure differential conditions
14. Equipped with standard pneumatic connectors, it can be driven by connecting clean and dry compressed air externally
15. Mostly used for wafer transfer Loadlock、 Etching deposition vacuum equipment
ending
3D80-00006-V1 low dust sealing stability, pneumatic buffering anti vibration, semiconductor vacuum chamber isolation special slit gate valve.