AE 2301260-A Controller Module  

The AE 2301260-A controller module is a matching board for AE RF power supply, which realizes RF power acquisition and closed-loop control.
Product Features
1. Board type modular design, convenient rack disassembly and replacement
2. Built in signal isolation circuit to resist electromagnetic interference from equipment
3. Multiple hardware protection, overvoltage, overcurrent, temperature standing wave protection
4. Fault self check alarm, output fault code for easy troubleshooting
5. High speed signal processing, quickly adapting to changes in load processes
Product Parameters
1. Power supply: 24VDC, supporting ± 10% voltage fluctuation
2. Communication: Supports BasicBus bus and multi device networking
3. Working temperature: -10 ℃~+60 ℃, suitable for dust-free workshops
4. Storage: onboard Flash, power off to save process recipe
5. Channel: Multi channel analog digital I/O, collecting power signals
Application Areas
1. Used in conjunction with AE Pinnacle186 series RF power supply
2. RF system control of semiconductor etching equipment
3. Power monitoring and control of thin film coating equipment
4. Replacement and maintenance of faulty spare parts for semiconductor production lines
5. Refurbishment, debugging, and renovation of the RF power supply unit
AE 2301260-A controller module ensures stable RF power output and meets the operational requirements of semiconductor process equipment