Agilent 0190-A3401 Dual Pump Controller

Model:0190-A3401
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

Agilent 0190-A3401 Dual Pump Controller

Product manual:

Agilent 0190-A3401 dual pump controller, Agilent vacuum system dual channel ion pump control unit, independently controls two ultra-high vacuum ion pumps, stable and reliable, with the following characteristics:
1. Agilent 0190-A3401 rack standard integrated body, easy disassembly and replacement of cabinets in situ
2. Dual channel independent drive, capable of starting, stopping, and regulating two ion pumps separately without interfering with each other
3. Real time collection of pump body voltage and current values, accurate display of converted chamber vacuum pressure
4. Built in intelligent start pressure regulation algorithm, the pump body is prone to vibration in high vacuum environment, and the pumping is stable
5. The whole machine EMI filtering circuit resists semiconductor cavity RF and plasma electromagnetic interference
6. Integrated multiple safety protections including overvoltage, overcurrent, short circuit, and high-voltage interlocking
7. Multi channel isolated digital IO, connected to vacuum valve, door body, and upper computer for process interlocking
8. RS232/485 communication interface, supporting remote parameter reading, start stop control, and data recording
9. Panel status indicator light, dual channel independent alarm, quickly locate single pump faults
10. Metal shielding shell, dust-proof and corrosion-resistant, suitable for clean semiconductor process workshops
11. Low voltage output ripple ensures long-term stability and no drift of ultra-high vacuum chamber pressure
12. Customizable pressure threshold, automatically switches to pump operation mode when the set value is reached
14. Gold plated high-voltage terminal block, not prone to oxidation and poor contact during long-term high load operation
15. Suitable for ultra-high vacuum equipment such as semiconductor deposition, etching, probe stations, etc. ion pump sets
ending
Agilent 0190-A3401 dual channel independent control, complete interlocking protection, dedicated control unit for semiconductor ultra-high vacuum equipment dual ion pump.