AMAT 0010-30770 Vacuum Pump Valve  

AMAT 0010-30770 Vacuum Pump Valve
1. Pneumatic drive structure, fast response speed of valve opening and closing
2. Gas shut-off self-locking protection to prevent pump oil from flowing back into the process chamber
3. Stainless steel valve body material, low exhaust, cleanliness meets semiconductor standards
4. Corrosion resistant sealing components, compatible with various corrosive gases in different processes
5. Extremely low leakage rate, ensuring the vacuum indicators of pipelines and chambers
6. Integrated position feedback switch, capable of providing feedback on valve status to equipment
7. Smooth flow channel without dead corners, reducing the risk of particle accumulation
8. Capable of withstanding alternating high and low temperature working conditions, stable long-term operation
9. High opening and closing cycle life, suitable for high-frequency switching operations on production lines
10. Standard flange interface, easy and convenient on-site disassembly and replacement
11. Effectively block airflow backflow and stabilize the process pressure inside the chamber
12. Capable of plasma tolerance and compatible with etching and deposition equipment
13. Native matching with AMAT equipment, can directly replace spare parts
14. Vacuum leak detection is completed at the factory, and the sealing performance is consistent
15. Compact body structure, saving installation space for vacuum pipelines
AMAT 0010-30770 vacuum pump valve is a specialized valve for semiconductor vacuum pump circuit isolation, with reliable sealing, clean and durable, ensuring the safe and stable operation of the vacuum system.