AMAT 0090-A3223 RF Electronic Module

Model:0090-A3223
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

AMAT 0090-A3223 RF Electronic Module

Product manual:

AMAT 0090-A3223 Semiconductor Equipment VME RF Control Electronic Module, controls RF power and matching circuits, adapts to deposition etching chambers, runs stably, with the following characteristics:
1. AMAT 0090-A3223 standard 6U VME card, the chassis can be directly plugged and replaced
2. Collect output power and reflected power signals, and adjust RF output in a closed-loop manner
3. Built in RF filtering circuit to resist cavity plasma RF interference
4. Equipped with hardware protection, automatic interlocking shutdown for overheating, overcurrent, and high reflection power
5. Multi channel analog and digital IO, linked matching device, vacuum door, process valve
6. Network port communication, uploading RF process data and fault logs to the upper computer
7. Panel LED indicator light, quickly locate power supply, communication, RF alarm
8. Gold plated backplate contacts, difficult to oxidize after long-term use in dust-free workshops, poor contact
9. Thickened copper PCB for long-term operation under full load, balanced heat dissipation and low temperature rise
10. Local flash memory stores RF calibration parameters, ensuring data is not lost during power outages
11. Support online debugging and remote firmware upgrade of modules without the need for downtime
12. Partition wiring of strong and weak current lines, power circuits do not interfere with RF sampling signals
13. Automatic full channel self-test upon startup, verifying acquisition, bus, and control circuits
14. Metal shielding shell, dust-proof and corrosion-resistant, suitable for semiconductor clean production lines
15. Supporting AMAT Centura and Endura series wafer process equipment
ending
AMAT 0090-A3223 RF acquisition and control integrated, with complete protection, is the core RF electronic module of semiconductor plasma process equipment.