AMAT 0090-A6100 Security Interface Module  

AMAT 0090-A6100 Security Interface Module
This AMAT original safety interlock board monitors machine safety signals and ensures stable maintenance and replacement
Product Features
1 AMAT original module, compatible with Centura Endura process platform
2. Monitor safety signals such as emergency stop valve vacuum, and trigger protection for abnormalities
3 hard wired logic design, fast response speed
4 redundant signal channels to reduce the risk of false triggering
5 onboard indicator lights, card insertion and easy disassembly
Product Specifications
Model 0090-A6100, semiconductor equipment safety interface PCB
2 board power supply DC24V, multi-channel safety signal acquisition
3 millisecond response to ensure machine safety interlock
4. Operating temperature range from 0 ℃ to 50 ℃, suitable for clean cabinets
Installation of 5 rack slots and installation into the equipment control cabinet
Application Areas
Semiconductor etching equipment, safety circuit interlock control
2 thin film deposition equipment, chamber safety signal monitoring
3 wafer processing equipment, emergency stop and door valve signal protection
4. Maintenance of semiconductor production lines, replacement of faulty safety board spare parts
5 Old Semiconductor Machine Safety Circuit Renovation
AMAT 0090-A6100 is a specialized safety interlock module for semiconductor machines, responsible for monitoring machine safety signals and triggering protection. It is a spare part for production line maintenance