AMAT 0100-00629 Generator Accessories  

AMAT 0100-00629 Generator Accessories
This AMAT accessory is a 300mm equipment rack interlocking component that ensures the safe operation of the generator circuit
Product Features
1. Compatible with AMAT’s original semiconductor generator rack, with fast interlocking signal response
2. The workshop has strong anti-interference ability and stable protection of equipment safety working conditions
3. Rack mounted installation, easy and convenient on-site disassembly and replacement
4. Original structure, high reliability for long-term continuous operation
5. Safety interlock protection, timely cutting off the circuit in case of abnormal status
Product Specifications
1. Compatible with 300mm wafer equipment generator rack
2. Multiple safety interlock signal channels
3. Working temperature: 0 to 50 degrees Celsius
4. Standard rack fixed installation method
5. Low signal delay output
Application Areas
1. Supporting equipment for semiconductor wafer manufacturing
2. Safety interlock control of plasma generator
3. Etching equipment generator rack components
4. Safety circuit of thin film deposition equipment
5. Replacement of spare parts for semiconductor production line equipment
AMAT 0100-00629 can be used stably for equipment maintenance or rack matching