Details
AMAT 0100-01370 Driver Box
Product manual:
AMAT 0100-01370 drive box, semiconductor equipment motor motion drive unit, controls the precise action of the actuator.
Product Features
1. Metal enclosed shell, resistant to radio frequency interference
2. Built in overcurrent and overload hardware protection
3. Stable output torque, less likely to lose steps
4. Fault status feedback for easy troubleshooting
5. Standard interface, easy disassembly and replacement
Product Parameters
1. Power supply 24VDC, allowing ± 10% voltage fluctuation
2. Pulse direction signal input and output
3. Working temperature -10 ℃~+60 ℃
4. Adapt to device motion bus signals
5. Equipped with hardware alarm output
Application Areas
1. AMAT etching deposition equipment motion mechanism drive
2. Replacement of spare parts for production line faults
3. Chamber execution motor drive control
4. Maintenance and technical renovation of equipment motion subsystem
5. Renovation and debugging of second-hand semiconductor equipment
AMAT 0100-01370 drive box ensures stable movement and positioning accuracy of the mechanism.
Product details picture:

0100-01370
product video
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