AMAT 0190-15553 Controller Module  

AMAT 0190-15553 RF generator provides stable RF energy output for semiconductor plasma process, exciting plasma to ensure the stability of etching thin film process
Product Features
Stable power output and good process consistency
Built in multiple protections to deal with abnormal loads
Support communication and interaction with the machine controller
Water cooling and heat dissipation are suitable for long-term continuous production
Built in fault self check to quickly locate problems
Application Areas
Semiconductor dry etching equipment
PECVD plasma thin film deposition equipment
PVD magnetron sputtering coating equipment
High density plasma deposition equipment
Semiconductor plasma cleaning machine
Panel plasma process equipment
Wafer surface plasma treatment device
Storage chip thin film manufacturing equipment
Research plasma experimental chamber
Optical coating plasma deposition equipment
Overall, AMAT 0190-15553 RF generator power stability and reliable protection are the core power supply components of semiconductor plasma technology