Details
AMAT 0190-53752 Input/Output Module
Product manual:
The AMAT 0190-53752 input/output module is a specialized board for DI water cooling systems in semiconductor machine applications. It is responsible for collecting signals and driving valves, and is easy to replace on site.
Features:
1. Specially manage the deionized water circuit and collect flow and pressure sensing signals.
2. Output signals to drive solenoid valves and water pumps, stabilizing the control of the water circuit.
3. Channel optoelectronic isolation reduces external interference and protects the board.
4. Equipped with a channel indicator light, the working status can be seen at a glance during maintenance.
5. Built in overcurrent and short circuit protection, single channel faults do not affect the entire board.
parameter
6. 24V DC power supply, compatible with the original power supply circuit of the machine.
7. Direct insertion installation, compatible with device chassis slots.
8. Support digital and analog signal acquisition.
9. Meet the working conditions of clean workshops and withstand humid environments.
10. The board has multiple hardware versions Rev C/D.
Application:
11. Control of the heat exchange and water cooling subsystem for semiconductor equipment.
12. DI deionized water flow rate and pressure monitoring and regulation.
13. AMAT machine cooling water circuit solenoid valve drive.
14. Maintenance and replacement of old modules in wafer equipment.
15. Reserve spare parts on the production line.
Summary: AMAT 0190-53752 waterway signal acquisition is stable and well protected, making it a commonly used I/O spare part for semiconductor cooling systems
Product details picture:

0190-53752
product video
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