AMAT 0190-54045 Helium Low Temperature Compressor  

AMAT 0190-54045 Helium Low Temperature Compressor Used for Continuous Supply of High Purity Helium in Closed Loop of Semiconductor Equipment to Maintain Stable Low Temperature Environment
Product Features
Output high-purity helium gas to reduce pipeline pollution
Stable gas supply pressure ensures cooling effect
Built in filtration system maintains helium cleanliness
Compact body for easy internal installation of the machine
Equipped with pressure protection and automatic shutdown for abnormal situations
Application Areas
Semiconductor Low Temperature Cold Pump Supporting System
Low temperature chamber of wafer etching equipment
Low temperature module of ion implantation machine
Thin film deposition low-temperature adsorption device
Low temperature cooling unit for wafer inspection
Low temperature vacuum system for lithography equipment
Material characterization of low-temperature vacuum equipment
Research on low-temperature adsorption vacuum system
Space simulation test of low-temperature chamber
Superconducting device testing refrigeration device
Overall, AMAT 0190-54045 helium low-temperature compressor is a clean, reliable, and adaptable semiconductor low-temperature vacuum process, which is a key supporting component of the low-temperature system of the machine