AMAT 0190-77528 servo motor

AMAT 0190-77528 servo motor
This application material is an original servo motor, which is a precision motion execution component of semiconductor equipment. It is stable and easy to use for maintenance and replacement
Product Features
1 AMAT original motor, compatible with Reflexion CMP series semiconductor equipment
2 built-in high-precision encoders, micrometer level positioning, high repeatability accuracy
3. Fast dynamic response, stable torque output, and low vibration noise during operation
4 cleanroom adaptation design to meet the requirements for clean use in semiconductor workshops
5 comes with overload and overheating protection, aviation plug wiring, strong anti-interference ability
Product Specifications
1 model 0190-77528, type AC servo motor
Rated power 400W, rated voltage 200V AC, rated current 2.6A
3 matching high-resolution encoders, closed-loop position and speed control
4. Operating temperature range from 0 ℃ to 50 ℃, suitable for clean workshop cabinet environment
5 flange installation structure, directly assembled on the equipment movement mechanism
Application Areas
Semiconductor CMP chemical mechanical polishing equipment, driven by precision mechanisms
2 wafer transfer robotic arms, material handling and positioning driving unit
3 semiconductor process chambers, precision displacement mechanism power components
4. Maintenance of semiconductor production lines, replacement of faulty servo motor spare parts
5 old semiconductor equipment renovation and upgrade, replacement of motion execution unit
AMAT 0190-77528 is the core power component of semiconductor polishing equipment, responsible for precision motion drive related to wafers, and is a commonly used spare part for semiconductor equipment maintenance