AMAT 0190-A5841 Dual Ion Pump Controller  

The AMAT 0190-A5841 dual ion pump controller is an application material semiconductor vacuum equipment accessory used to control two ion pumps, maintain high vacuum in the chamber, and is a regular maintenance spare part on the production line.
Product Features
1. Dual channel independent control, capable of managing two ion pumps separately
2. Equipped with multiple protections, it automatically shuts down in case of short circuit or overcurrent, ensuring high safety
3. Comes with a built-in display screen, allowing for direct viewing of vacuum and voltage data, making debugging convenient
4. Strong anti-interference ability, stable long-term operation in clean cabinets
5. Rack mounted installation, easy disassembly and assembly, reduces downtime for maintenance
Product Specifications
1. Supports dual high voltage output, voltage can be adjusted as needed
2. Universal 100-240V AC power supply, compatible with workshop power supply
3. Comes with multiple communication interfaces, capable of communicating with the machine’s main control panel
4. Real time monitoring of pump body current and conversion of vacuum pressure
5. Support current upper limit setting to prevent pump body overload damage
Product application areas
1. AMAT Semiconductor Process Chamber Ion Pump Drive Control
2. Maintaining high vacuum environment in thin film deposition equipment
3. Vacuum chamber pressure monitoring and pump body protection
4. Vacuum system control of semiconductor testing equipment
5. Repair and replacement of old vacuum machine, restoration of vacuum control
AMAT 0190-A5841 dual ion pump controller has stable vacuum control, suitable for spare parts stocking on production lines and on-site fault replacement.