AMAT 1350-00681 Capacitive Pressure Gauge  

AMAT 1350-00681 is a capacitive pressure gauge used for precise vacuum pressure monitoring of process chambers in semiconductor machines.
Product Features
1. Principle of capacitive thin film sensing, measurement results are not affected by gas types, and process pressure readings are stable
2. Corrosion resistant metal film, suitable for corrosive process gas environments such as etching and deposition
3. Equipped with a temperature compensation circuit to reduce measurement drift caused by temperature fluctuations in the chamber
4. Analog signal output, can be directly connected to the machine main control, real-time closed-loop control of process pressure
5. Standard vacuum flange interface, easy disassembly and assembly in dust-free workshop, short downtime for spare parts replacement
Product Specifications
1. Model: 1350-00681
2. Product type: Capacity Manometer
3. Power supply: 15VDC
4. Output: Analog pressure signal
5. Compatible machines: AMAT Centura, Endura series semiconductor equipment
Application Areas
1. Pressure monitoring of semiconductor etching chamber
2. Vacuum process control of thin film deposition equipment
3. Pressure closed-loop adjustment of wafer processing machine
4. AMAT Semiconductor Production Line Maintenance Spare Parts Replacement
5. Renovation and renovation project for old semiconductor equipment
The AMAT 1350-00681 capacitive pressure gauge is a core vacuum spare part for semiconductor process chamber vacuum pressure monitoring and equipment maintenance.