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ARTESYN Technologies 73-956-4008G2 Molecular Pump Controller
Product manual:
ARTESYN Technologies 73-956-4008G2 Molecular Pump Controller
ARTESYN 73-956-4008G2 is a dedicated drive control power supply for semiconductor vacuum turbine molecular pumps, which controls the start stop and speed closed-loop operation of the molecular pump
1. Compatible with Varian and Agilent series industrial turbo molecular pumps, used in conjunction with vacuum chambers
2. High precision frequency conversion output, stable control of molecular pump rotor speed, smooth vacuum pumping efficiency
3. Wide AC power grid input, able to withstand workshop voltage fluctuations, low output ripple
5. Real time collection of pump body temperature, speed, and current data, feedback to the machine main control
6. Electrical isolation design to isolate cavity RF interference and avoid false alarms due to speed loss control
7. Equipped with a built-in status indicator light, it intuitively displays standby, acceleration, normal, and fault modes
8. Standard industrial communication interface, supporting interlocking with etching and film equipment main control
9. Built in soft start program, slowly increasing speed to reduce rotor impact and extend pump bearing life
10. Metal enclosed shell, built-in heat dissipation duct, controllable temperature rise under full load for a long time
11. Low release circuit board, meeting the clean use standards of dust-free wafer workshops
12. Modular plug and unplug wiring terminals, easy and fast maintenance, disassembly, and replacement
13. Internal components are reinforced for earthquake resistance, making it difficult for welding faults to occur under continuous vibration conditions on the production line
14. Support dual modes of local panel control and remote machine program start stop
15. Rack mounted compact size, occupying small space inside the vacuum control cabinet
Overall, ARTESYN 73-956-4008G2 has stable power supply and complete protection, making it the core driving and control component of semiconductor high vacuum system molecular pumps
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73-956-4008G2
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