Brooks Automation 013501-069-25 Controller Module    

Brooks Automation 013501-069-25 controller module, a dedicated motion control unit for semiconductor wafer manipulators, controls the logic of the manipulator axis motion.
Product Features
1. Multi axis motion calculation, synchronized control of multi joint movements of the robotic arm
2. Optoelectronic isolation I/O channel to resist electromagnetic interference in clean rooms
3. On board fault diagnosis, quickly locate motion and communication abnormalities
4. Slot type board structure, easy replacement and disassembly of spare parts on site
5. Industrial grade components, suitable for long-term uninterrupted operation of the machine
Product Specifications
1. Power supply 24VDC machine backplane power supply
2. Support multi axis servo drive signal output
3. Working temperature 0-60 ℃ Clean room working conditions
4. High speed internal bus communication
5. Integrated digital input/output signal interface
Application Areas
1. Motion control of semiconductor wafer handling robot arm
2. Logic scheduling of the robotic arm inside the vacuum chamber
3. Wafer loading and unloading equipment main control unit
4. Motion signal processing of semiconductor process equipment
5. Brooks robotic arm spare parts maintenance and replacement
During the maintenance and repair of the robotic arm system, Brooks Automation 013501-069-25 ensures precise and stable execution of wafer handling actions.