DAIHEN SVD-002-X0834 aligner  

The DAIHEN SVD-002-X0834 aligner is a semiconductor EFEM wafer positioning unit that relies on optical recognition to complete wafer edge/notch alignment, and cooperates with a robotic arm to complete wafer loading positioning.
Product Features
1. Built in optical detection components, high-speed recognition of wafer edge and notch features
2. Servo rotation alignment, high precision in angle repetition positioning, reduces the risk of debris
3. Clean grade low dust structure, meeting the conditions for use in dust-free workshops
4. Anti dust coating on the lens reduces particle interference and ensures stable recognition
5. Modular whole machine, convenient on-site disassembly and maintenance
Product Parameters
1. Power supply 24VDC, allowing ± 10% voltage fluctuation
2. Supports multi specification wafers, with programmable parameter switching
3. Operating temperature of 10-45 ℃, suitable for the surrounding working conditions of semiconductor equipment chambers
4. Device bus communication, real-time feedback of alignment results and status signals
5. Equipped with card jamming, anomaly detection, hardware protection, and alarm output
Application Areas
1. Alignment of notch flat edges in semiconductor EFEM wafer transfer system
2. Pre positioning station for feeding of etching and coating equipment
3. Replacement and repair of spare parts for semiconductor production lines due to malfunctions
4. Wafer handling robot matching positioning unit
5. Renovation and debugging of second-hand semiconductor equipment
DAIHEN SVD-002-X0834 aligner has a fast positioning response, ensuring consistency in wafer handling processes and improving overall equipment yield.