DAIHEN SVD-121-X0834 aligner

The DAIHEN SVD-121-X0834 aligner is a semiconductor device wafer positioning component that completes wafer notch recognition and angle alignment processing.
Product Features
1. Optical non-contact detection to avoid scratches on the wafer surface
2. Support gap and edge dual benchmark recognition mode
3. High speed computational processing reduces wafer alignment time
4. Clean room adaptation structure, low dust and low gas release
5. Modular structure, convenient on-site disassembly and maintenance
Product Parameters
1. Power supply 24VDC, voltage fluctuation allowed ± 10%
2. Compatible with 300mm specification silicon wafers
3. Working temperature 0-40 ℃, used in dust-free workshops
4. Communication support device bus docking with upper computer
5. Equipped with vacuum pressure monitoring and abnormal alarm
Application Areas
1. Semiconductor etching equipment wafer positioning and alignment
2. Calibration of thin film deposition equipment chamber wafers
3. Replacement and maintenance of spare parts for semiconductor production lines
4. Wafer transfer system renovation and upgrade project
5. Renovation and debugging of second-hand semiconductor equipment
DAIHEN SVD-121-X0834 aligner has high positioning accuracy, ensuring stable and reliable wafer transfer alignment of semiconductor process equipment