Edwards A57222958 Dry Vacuum Pump  

Edwards A57222958 Dry Vacuum Pump
Product Features
1. Edward iHX610 series semiconductor dry screw vacuum pump
The oil-free dry structure will not contaminate the semiconductor process chamber
3. Built in nitrogen purging design to resist dust and corrosive process gases
4. Water cooling and heat dissipation structure operates stably under long-term heavy load and continuous operation
Equipped with intelligent monitoring unit, real-time collection of pump operating parameters
6. Equipped with multiple protections such as overheating and overload, automatic alarm and shutdown for faults
7 supports industrial bus communication and can be connected to the upper control system of the device
8. Low vibration design reduces interference with precision processes
9. The overall structure is stable and suitable for installation in clean workshops
10 original semiconductor dry pumps are mostly used for maintenance and replacement of production line equipment

Application Areas
1. Vacuum extraction for semiconductor etching process
2 thin film deposition PVD CVD vacuum unit matching
Vacuum maintenance in wafer manufacturing process
Manufacturing of 4 panels under high load vacuum conditions
Replacement of old vacuum equipment spare parts in 5 semiconductor factories

The Edwards A5722958 semiconductor process dry screw vacuum pump is compatible with the iHX610 vacuum unit for use