Edwards AC6E1B123300XS Dry Vacuum Pump  

Edwards AC6E1B123300XS Dry Vacuum Pump
Product Features
1. Edward Semiconductor Multi stage Roots Dry Vacuum Pump Oil free Dry Pump Structure
2. Can extract semiconductor process gases containing dust and slight corrosiveness
3. Built in nitrogen purge protection to reduce sedimentation inside the pump body
4. Water cooling and heat dissipation design ensures stable long-term continuous process operation
Equipped with a running status monitoring module for real-time feedback of pump parameters
6. Equipped with multiple protections such as overheating and overload, automatic shutdown for abnormal situations
7 supports communication signal output and access to the upper control system of the device
8. Low vibration and low noise to reduce interference with precision processes
The compact structure of the whole machine saves installation space in the clean workshop
10 Common Maintenance and Replacement Methods for Original Factory Supporting Dry Pump Semiconductor Production Lines

Application Areas
1. Vacuum extraction for semiconductor etching process
2 thin film deposition equipment vacuum unit matching
3. Vacuum environment maintenance of ion implantation equipment
Vacuum system for photovoltaic cell production line 4
Replacement of old vacuum equipment spare parts in 5 semiconductor factories

The Edwards AC6E1B123300XS semiconductor process dry vacuum pump is compatible with corresponding semiconductor vacuum equipment