Edwards ACDA0A122200 Vacuum Pump  

Edwards ACDA0A122200 Vacuum Pump
Product Features
1 Edward Semiconductor supporting dry vacuum pump unit
2 oil-free dry pump structure outputs clean vacuum without oil pollution
3 adaptive process gas extraction can process gases containing trace amounts of dust
4. Equipped with a water-cooled cooling system, it can work continuously for a long time with stable temperature rise
5 built-in status monitoring modules for real-time collection of pump operating parameters
Equipped with multiple protections such as overload and overheating to prevent damage to the pump body
7 supports communication signal output and can be connected to the upper control system of the device
8. Compact pump body structure saves installation space in clean workshops
9. Low operating vibration reduces interference with precision processes
10 Common Maintenance and Replacement Methods for Original Vacuum Equipment Semiconductor Production Lines

Application Areas
1. Vacuum extraction for semiconductor equipment process
2 thin film deposition equipment vacuum unit matching
3. Vacuum environment maintenance for etching process
4. Construction of Photovoltaic Production Vacuum System
Replacement of spare parts for 5 precision vacuum equipment

Semiconductor process matching dry vacuum pump Edwards ACDA0A122200 is suitable for corresponding vacuum process equipment use