Edwards ACF31B122300 Drying Vacuum Pump   

Edwards ACF31B122300 drying vacuum pump, as a pre drying pump for semiconductor machines, is responsible for maintaining the basic vacuum environment of the process by roughly pumping the cavity
Product Features
Oil free dry structure will not produce oil pollution
Fast pumping speed to quickly complete cavity pre pumping
Resistant to process corrosion and compatible with various process gases
Low operating noise, stable vibration
Equipped with status monitoring for easy operation and maintenance
Application Areas
Semiconductor dry etching rough extraction system
Pre vacuum unit for CVD thin film deposition
PVD magnetron sputtering vacuum unit
Rough vacuum circuit of ion implantation machine
Vacuum extraction of wafer load lock chamber
Plasma cleaning equipment vacuum system
Vacuum equipment for LCD panel manufacturing
Photovoltaic thin film production vacuum unit
Rough pumping device for scientific research vacuum experiment
Material surface treatment vacuum equipment
Overall, Edwards ACF31B122300 drying vacuum pump is a core component for pre pumping in semiconductor vacuum systems, with clean, corrosion-resistant, and stable operation