Details
EDWARDS D37902000 Controller
Product manual:
EDWARDS D37902000 is an Edward TIC series vacuum instrument controller and maintenance spare part for semiconductor vacuum equipment.
1. Support automatic recognition of multiple vacuum gauges and precise collection of chamber pressure
2. Equipped with analog output and relay point position, it can be linked to control peripheral components
3. Built in pressure threshold alarm, timely prompt for abnormal status
4. Graphic display screen, intuitive operation, supports remote parameter configuration
5. Modular rack installation, easy on-site replacement
1. Support Barocel capacitive pressure sensors
2. Communication interface RS232/RS485
3. Six customizable pressure setting points
4. Supporting upper computer software to record vacuum data
5. Adapt to the working conditions of semiconductor cleanrooms
1. Vacuum pressure monitoring and control of semiconductor machines
2. Vacuum coating and etching equipment pressure collection
3. Replacement and repair of the original Edward vacuum controller malfunction
4. Laboratory vacuum system supporting control
5. Spare parts reserve for semiconductor production line maintenance
This EDWARDS D37902000 is responsible for vacuum pressure monitoring and signal output, and is a commonly used spare part for semiconductor equipment vacuum systems such as Panlin and Applied Materials
Product details picture:

D37902000
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