Edwards NRY24F000 vacuum pump  

Edwards NRY24F000 vacuum pump
Product Features
1. Edward NRY series semiconductor multi-stage Roots dry vacuum pump
2. Oil free dry pump structure to avoid oil pollution in the process chamber
3 can handle semiconductor process gases containing dust and slightly corrosive substances
4. Built in water-cooled heat dissipation for long-term continuous process operation and stability
Equipped with intelligent monitoring module to collect real-time pump operating parameters
6. Equipped with multiple protections such as overheating and overload, automatic shutdown for abnormal situations
7 supports communication signal output and access to the upper control system of the device
8. Low vibration and low noise to reduce interference with precision processes
The compact structure of the whole machine saves installation space in the clean workshop
10 Common Maintenance and Replacement Methods for Original Factory Supporting Dry Pump Semiconductor Production Lines

Application Areas
1. Vacuum extraction for semiconductor etching process
2 thin film deposition equipment vacuum unit matching
3. Vacuum environment maintenance of ion implantation equipment
Vacuum system for photovoltaic cell production
5 Replacement of spare parts for old semiconductor vacuum equipment

The Edwards NRY24F000 semiconductor process dry vacuum pump is compatible with corresponding semiconductor vacuum equipment