Edwards NRY4JC000XS vacuum pump   

Edwards NRY4JC000XS vacuum pump
Product Features
1. Edward Semiconductor Dry Multi stage Roots Vacuum Pump Oil free Dry Structure
2. Stable pumping speed output suitable for semiconductor process vacuum pumping requirements
The structure of the corrosion-resistant pump body can handle process gases containing trace amounts of dust
4. Built in intelligent monitoring module for real-time collection of pump operating status parameters
Equipped with multiple protection mechanisms, automatic shutdown protection against overheating and overload
6 Supports bus communication and can be connected to the upper control system of semiconductor devices
7. Low vibration and low noise design to reduce interference with precision processes
8. Compact body saves space for clean workshop placement
9. Long maintenance cycle reduces production line downtime and maintenance time
10 commonly used maintenance and replacement of semiconductor equipment for original factory vacuum pumps

Application Areas
1. Vacuum unit supporting semiconductor etching process
2. Maintenance of vacuum environment for thin film deposition equipment
Vacuum extraction operation of ion implantation equipment
Vacuum system for photovoltaic cell production line 4
5 Replacement of spare parts for old semiconductor equipment

The Edwards NRY4JC000XS semiconductor process dry vacuum pump is compatible with corresponding semiconductor vacuum equipment