Edwards STP-iXR1606C Turbomolecular Pump  

Edwards STP-iXR1606C Turbomolecular Pump Provides High Vacuum Environment for Semiconductor Process Chambers to Ensure Process Stability
Product Features
Magnetic levitation oil-free design with high vacuum cleanliness
Sufficient pumping speed to quickly establish high vacuum
Low operating vibration does not affect precision processes
Built in diagnostic function for real-time monitoring of status
Strong anti sedimentation ability and adaptability to corrosion processes
Application Areas
Semiconductor dry etching vacuum chamber
CVD thin film deposition vacuum system
Ion implantation machine with vacuum unit
High vacuum chamber for wafer inspection
Optical coating vacuum production equipment
Mass spectrometer vacuum chamber
Electron microscope vacuum system
Material research vacuum experimental device
Vacuum leak detection equipment host
Surface analysis instrument vacuum module
Overall, the Edwards STP-iXR1606C turbomolecular pump is a commonly used high vacuum core component in semiconductor and precision analysis equipment due to its cleanliness, durability, and good stability