Details
Edwards YT36-80-100 Turbomolecular Pump Turbine
Product manual:
Edwards YT36-80-100 Turbomolecular Pump Turbine is the core rotor component of the molecular pump, which relies on high-speed rotation to achieve gas extraction from the support chamber in a high vacuum environment
Product Features
High precision impeller ensures stable pumping performance
Durable material resistant to process gas corrosion
Excellent dynamic balance, low vibration during high-speed operation
Surface treatment to reduce dust adhesion
Suitable for easy disassembly and replacement of corresponding pump bodies
Application Areas
Semiconductor etching equipment vacuum chamber
Vacuum system for thin film deposition equipment
Ion implantation machine with vacuum unit
High vacuum chamber for wafer inspection
Optical coating vacuum production equipment
Mass spectrometer vacuum chamber
Electron microscope vacuum system
Material research vacuum experimental device
Vacuum leak detection equipment host
Surface analysis instrument vacuum module
Overall, the Edwards YT36-80-100 turbo molecular pump is a critical rotor spare part for molecular pumps, with reliable accuracy and adaptability to various high vacuum process equipment for maintenance and replacement
Product details picture:

YT36-80-100
product video
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