FUJIKIN FCSP8202D-4CW2-F139BF39B Mass Flow Controller  

FUJIKIN FCSP8202D-4CW2-F139BF39B Fuji Gold Mass Flow Controller, pressure type MFC, semiconductor process gas flow closed-loop control component.
Product Features
1. Pressure type flow control, with minimal impact of temperature fluctuations on flow and stable control
2. SUS316L clean body, oil-free treatment, suitable for various process gases
3. W-seal sealing structure, excellent sealing performance, low leakage rate
4. Equipped with fault diagnosis function, it is convenient to diagnose gas supply and valve abnormalities
5. Digital communication interface, convenient for the upper computer to read and modify traffic parameters
Product Specifications
1.11-25VDC DC power supply
2. Gas supply pressure 250-898kPaG
3. Working temperature 0-50 ℃ clean room environment
4.4CW2 interface specification, sealing spacing 92mm
5. Compatible with inert and partially corrosive process gases
Application Areas
1. Control of process gas flow rate in semiconductor etching equipment
2. Precise control of gas flow rate in thin film deposition equipment
3. Vacuum process chamber gas supply unit
4. Special gas pipelines for wafer processing equipment
5. Maintenance and replacement of Fuji Gold MFC spare parts
During the maintenance and replacement of process gas pipelines, FUJIKIN FCSP8202D-4CW2-F139BF39B can achieve precise and stable output of process gas flow rate