GENMARK 990010622 Robot Controller

Model:990010622
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

GENMARK 990010622 Robot Controller

Product manual:

GENMARK 990010622 Robot Controller
GENMARK 990010622 is a dedicated multi axis controller for semiconductor wafer handling robots, which controls the wafer transfer actions in vacuum and atmospheric environments
1. Dedicated motion processing chip, multi axis synchronous operation, smooth handling trajectory
2. High precision motion algorithm with small positioning error to avoid scratching the wafer
3. Multiple IO signal channels, connected to pre alignment, vacuum suction cups, and door sensing components
4. Support standard industrial communication protocols and real-time data interaction with device controllers
5. Supporting debugging program, capable of teaching points, modifying parameters, and upgrading firmware
6. Integrated multi-layer safety protection for overcurrent, overtravel, disconnection, and overheating
7. The panel indicator lights visually display the status of operation, servo, and communication faults
8. Signal isolation design, resistant to cavity RF interference, prevents robotic arm misoperation
9. Adequate local storage space to store multiple sets of different handling process programs
10. Low release circuit board, compliant with the standards for use in dust-free wafer workshops
11. Modular design of rack, easy disassembly and maintenance operation
12. Internal components undergo seismic reinforcement, making the production line less prone to failure due to long-term vibrations
13. Compatible with single arm and dual arm robotic arms, compatible with 200/300mm wafers
14. Adjustable dynamic parameters reduce mechanical shaking during high-speed handling
15. Compatible with etching and thin film equipment internal wafer transfer robotic arm
Overall, GENMARK 990010622 has precise positioning, cleanliness, and stability, making it the core control component of semiconductor automatic chip transfer systems