Details
GENMARK 9900106611 System Controller
Product manual:
GENMARK 9900106611 System Controller
This Genmark original controller is the core control unit of semiconductor wafer handling robots, and maintenance replacement is very practical
Product Features
1 Original Genmark controller, compatible with GPR GREX series wafer handling robots
2 Support multi axis synchronous motion control, smooth trajectory, high positioning accuracy
3 compatible with SECS GEM communication protocol, capable of interfacing with upper level automation systems in factories
4. Equipped with device diagnostic function, convenient for on-site troubleshooting of robot malfunctions
5 built-in multiple safety protections, timely alarm in case of overload or position deviation
Product Specifications
Model 9900106611, type: wafer robot system controller
2 communication interfaces support RS232 Ethernet TCP IP
3 sets of GB Toolbox tools, supporting parameter editing and firmware upgrade
4. Operating temperature range from 0 ℃ to 50 ℃, suitable for clean workshop environment
5 rack mounted installation, directly assembled in the EFEM equipment control cabinet
Application Areas
1 Semiconductor wafer handling robot, complete machine motion control
2 EFEM wafer front-end modules, material transfer scheduling
300mm wafer processing equipment, wafer handling and alignment control
4. Maintenance of semiconductor production line equipment, replacement of faulty controller spare parts
Upgrading and retrofitting the main control unit of 5 old wafer automation equipment
GENMARK 9900106611 is the core brain of wafer transfer equipment, responsible for robot motion scheduling and factory communication docking, and is a key spare part for semiconductor equipment maintenance
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9900106611
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