HITACHI CX3202 Controller  

HITACHI CX3202 Controller
HITACHI CX3202 specializes in precise gas flow control for semiconductor electric furnaces
2. Built in high-precision sensor acquisition, real-time monitoring and acquisition of gas parameters
3. Equipped with multiple circuit protections, automatic shutdown protection for overvoltage, overcurrent, and overheating
4. Anti industrial electromagnetic interference, stable operation of clean workshop conditions
5. The panel comes with a status indicator light, which allows for intuitive and quick diagnosis of faults
6. Support local button setting parameters, easy and convenient debugging operation
7. Fast response speed, airflow fluctuations can be quickly closed-loop corrected to stabilize voltage and flow
8. Compatible with standard industrial 24V DC power supply, with strong on-site wiring adaptability
9. Compact body structure, suitable for embedded fixed installation in cabinets
10. Dustproof and moisture-proof PCB protective coating, suitable for semiconductor clean environment
11. Can communicate with the upper computer, remotely issue parameters and upload operational data
12. Support multiple HITACHI CX3202 networking collaborative linkage control
13. Equipped with operation log recording function, easy to trace and repair in the later stage
14. Strong adaptability to temperature and humidity, and the working conditions around the constant temperature furnace body are not easily abnormal
15. Equipped with Hitachi’s complete furnace system, the overall software and hardware compatibility is high
In summary, the HITACHI CX3202 controller is a high-precision gas process control unit specifically designed for semiconductor heat treatment furnaces.