HORIBA SEC-Z511X Mass Flow Controller   

HORIBA SEC-Z511X quality flow controller, precision flow control MFC for semiconductor process gases.
Product Features
1. Multi gas and multi range, switchable gas and range on site
2. High precision flow control and good process repeatability
3. Variable PID, fast response speed
4. Metal gas path, polished inner wall, excellent sealing performance
5. Supports various communications such as simulation and EtherCAT
6. Piezoelectric valve control, flow regulation with linear stability
7. Comes with status feedback for easy troubleshooting
8. Resistant to pressure fluctuations and adapted to machine operating conditions
9. Compact size, easy panel installation
10. Support continuous operation of 7 × 24-hour production line
Product Parameters
1. Model: HORIBA SEC-Z511X
2. Type: Digital Mass Flow Controller MFC
3. Gas path material: 316L stainless steel
4. Power supply: 24VDC
5. Applicable: Semiconductor etching and coating process equipment
HORIBA SEC-Z511X mass flow controller is a commonly used gas flow spare part in semiconductor processes.