INFICON NISEE3110 Controller  

INFICON NISEE3110 controller, Inficon semiconductor coating process controller, based on crystal oscillator sensing for closed-loop control of film rate and thickness.
Product Features:
1. High precision crystal oscillator sensing acquisition, real-time monitoring of coating rate and film thickness
2. Built in closed-loop algorithm, automatically adjusts the power of the evaporation source to stabilize the process
3. Multi channel sensor access, compatible with crystal oscillator probes, pressure, and temperature signals
4. Process formula storage, allowing for quick retrieval of multiple coating programs
5. Fault code prompt, convenient for on-site troubleshooting, supports online parameter modification
Product Parameters:
1. Signal: Mixed signal of analog and digital
2. Communication: RS232, Ethernet interface
3. Working temperature: 10-50 ℃ in a clean environment
4. Shell: Metal dustproof shell
5. Installation: Fixed rack installation
Application fields:
1. Process control of semiconductor vacuum coating equipment
2. Monitoring of deposition rate and thickness of optical thin films
3. Closed loop control of evaporation and sputtering processes
4. Surrounding control unit for vacuum chamber
5. Replacement of spare parts for semiconductor equipment in case of malfunction
Overall, the INFICON NISEE3110 controller is the core control unit of the coating process, ensuring the accuracy of thin film deposition and process consistency