Intellisys 27-408884-00 Adaptive Passive Controller

The Intellisys 27-408884-00 vacuum pressure controller is commonly used in semiconductor vacuum equipment and is frequently sought after for maintenance of old chambers.
5 product features:
1. Equipped with adaptive algorithm, automatically adjust control parameters when operating conditions fluctuate
2. Automatically complete valve initialization calibration upon power on, reducing manual debugging
3. Support local manual operation and also support remote control from the upper level
4. Aluminum shell, resistant to workshop electromagnetic interference, suitable for vacuum process environment
5. Directly matched with matching throttle valve, the entire system is easy to connect
5 product parameters:
1. Pressure control accuracy ± 0.2% FS full range
2. Multi class communication interfaces including analog, digital, and DeviceNet
3. Compatible with APC-x00A and APC-x50A series throttle valves
4. Anti static installation requirements, applicable to semiconductor workshops
5. Suitable for 24V industrial power supply of the machine
5 application areas:
1. Vacuum pressure regulation of semiconductor etching chamber
2. Process pressure control of thin film deposition equipment
3. Pressure control of research vacuum experimental device
4. Automated docking of production line upper system
5. Replacement and maintenance of spare parts for semiconductor equipment
Many old vacuum process machines rely on Intellisys 27-408884-00 to stabilize the chamber process pressure