KLA Tencor 710-300012-00 Controller Module

Product manual:

product overview
The KLA Tencor 710-300012-00 controller module is a core circuit unit that integrates control functions,
Usually deployed in high-end semiconductor equipment such as wafer inspection, optical measurement, and mask inspection.
It undertakes key tasks such as signal scheduling, instruction distribution, motion control, and multi module coordination at the core of the system,
It is an important hardware component for achieving precise control and stable operation of equipment.

Main application areas
Wafer defect detection equipment
In the process of surface defect detection or critical dimension measurement,

Image and Data Acquisition System Control
The controller module coordinates the communication between the high-speed image acquisition card, lighting system, and sensors,
Enable real-time transmission and processing of detection data between multiple modules.

Multi axis motion control system
Manage the position, speed, and trajectory of multi axis equipment such as probe platforms, optical lenses, or wafer racks,
Micro level positioning control is often achieved through stepper or servo motors.

Signal scheduling and feedback processing
Receive from various sensors (such as position encoders, temperature sensors, pressure detectors, etc.)
The feedback signal is processed in real-time and the execution unit is controlled to respond promptly.

System integration module bridging
This module is usually connected to other functional boards through a backplane or bus system,
Such as I/O modules, processor modules, storage modules, image processing cards, etc., to achieve system level modular integration and unified scheduling.

Adapt to complex industrial environments
Support long-term continuous operation, with high anti-interference ability, stable heat dissipation and power protection design,
Suitable for deployment in high cleanliness, high electromagnetic interference, or temperature and humidity controlled factory workshop environments.

Typical usage equipment
KLA Tencor wafer inspection platform (such as SP, P, eS series)

Probe testing system

Mask template detection and photolithography alignment equipment

Automated handling and loading robotic arm control system

Product details picture:

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