Kokusai Electric CX1231 Controller Module  

Kokusai Electric CX1231 is a dedicated controller module for vertical diffusion furnaces, which controls furnace temperature, gas path, and interlocking logic. It is the core component of heat treatment machines.
Characteristics
1. Stable process logic operation ensures reliable execution of furnace tube temperature control process
2. Integrated safety interlock detection, equipment protection triggered by abnormal conditions
3. ESD protection design, suitable for semiconductor cleanroom operating conditions
4. Rack card insertion structure, easy to disassemble, replace and maintain
5. Native matching of Vertron III DD-803V furnace body system
parameter
1. Responsible for temperature logic control of multiple groups in the furnace area
2. Docking gas and vacuum multi-channel signal channels
3. Rack mounted module installation
4. Working temperature 0-55 ℃
5. Complete data exchange with the upper system of the machine
Application
1. International Electrical Vertical Diffusion Furnace Equipment Control
2. Wafer LPCVD heat treatment process machine
3. Replacement of spare parts for semiconductor furnace tube equipment
4. Repair of hardware faults in process furnaces
5. Technical renovation and maintenance of old semiconductor machines

When there is a process error or interlock abnormality in the furnace tube, Kokusai Electric CX1231 is the priority control module for troubleshooting.