KYOSAN EAK2T 3M39-000028-12 matching controller  

KYOSAN EAK2T 3M39-000028-12 matching controller

1. Automatic matching and adjustment of RF impedance, quickly adapting to changes in load impedance
2. Suitable for high-frequency RF power supply system, with fast output response speed
3. Built in power detection unit, real-time collection of loop power data
4. Support closed-loop feedback control to reduce RF loop reflection power
5. Industrial grade hardware structure, suitable for semiconductor process equipment environment
6. Equipped with fault self checking function, quick identification and alarm of abnormal states
7. The communication interface can be connected to the upper computer to achieve parameter reading and distribution
8. Strong anti-interference ability, able to cope with on-site electromagnetic interference environment
9. High adjustment accuracy ensures stable RF output during the process
10. Compact size, easy to install and layout inside the cabinet
11. Support multi gear working modes, compatible with different process conditions
12. The internal components have good temperature resistance and reliable long-term continuous operation
13. Real time monitoring of standing wave ratio to protect RF power supply from damage
14. Parameters can be stored locally, and configuration information will not be lost after power failure
15. Compatible with KYOSAN series RF power supply for complete use
The KYOSAN EAK2T 3M39-000028-12 matching controller is mainly used for impedance matching of semiconductor RF loads, reducing reflection losses and ensuring stable operation of equipment processes.