Kyosan Electric 0190-64462 RF Generator    

Kyosan Electric 0190-64462 RF generator provides stable RF energy output for semiconductor plasma processes, exciting plasma to ensure stable etching of thin films
Product Features
Stable power output, good process repeatability
Built in multiple protections to deal with abnormal loads
Support communication docking with the main control system of the machine
Water cooling and heat dissipation are suitable for long-term continuous production
Fault self inspection is convenient and quick to locate problems
Application Areas
Semiconductor dry etching equipment
PECVD plasma thin film deposition equipment
PVD magnetron sputtering coating equipment
High density plasma deposition equipment
Semiconductor plasma cleaning machine
Panel plasma process equipment
Wafer surface plasma treatment device
Storage chip thin film manufacturing equipment
Research plasma experimental chamber
Optical coating plasma deposition equipment
Overall, Kyosan Electric 0190-64462 RF generator power stability and reliable protection are the core power supply components of semiconductor plasma technology