Details
LAM 810-073479-005 Printed Circuit Board
Product manual:
LAM 810-073479-005 Printed Circuit Board
1. LAM equipment gas box main control PCB board, compatible with Jetstream cavity system
2. Multi channel implementation of gas flow signal acquisition and output
3. Multi layer controlled wiring ensures high-speed signal transmission
4. Built in filtering to suppress plasma electromagnetic interference
5. Electrical isolation to prevent surge damage to devices
6. Onboard status indicator light, quickly locate faults
7. Industrial components, supporting 7 × 24-hour production line operation
8. Static overcurrent protection to reduce the risk of board damage
9. Multiple sets of standard interfaces, compatible with various pneumatic control components
10. Strengthen the substrate to resist equipment vibration during operation
11. Single channel independent protection, no downtime due to local faults
12. Can upload operational status for easy machine diagnosis
13. Wide temperature tolerance, adaptable to changes in cabinet temperature
14. Gold plated connectors, resistant to insertion and extraction, stable contact
15. Original factory specifications, matched with LAM’s complete set of process equipment
LAM 810-073479-005 printed circuit board, as the main board of the gas box, completes the processing and control of semiconductor equipment gas path signals.
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810-073479-005
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