MEGA-FABS 00070-2015-000-01 Thermal Control Module  

MEGA-FABS 00070-2015-000-01 is a thermal control module for semiconductor equipment, which achieves closed-loop temperature regulation of the cavity and process components
Product Features:
1. High precision PID temperature control algorithm, with small temperature fluctuations, ensuring consistent process temperature
2. Multiple temperature acquisition channels, capable of synchronously reading signals from multiple temperature sensors
3. Equipped with over temperature and low temperature fault alarms, it can be linked with equipment to perform protective actions
4. Onboard isolation protection, resistant to RF environmental interference, high operational stability
5. Modular board design, easy disassembly and assembly, convenient for on-site spare parts replacement
Product Parameters:
1. Power supply voltage DC24V
2. Working temperature -10 ℃~+60 ℃
3. Temperature measurement supports PT100 thermal resistance signal
4. Communication interface internal device bus
5. Installation form: Chassis slot type
Application fields:
1. Semiconductor process chamber temperature control unit
2. Temperature control signal processing for thin film deposition equipment
3. Thermal management control system for wafer processing equipment
4. Replacement of temperature control spare parts for high-end vacuum process equipment
5. Multi point temperature monitoring of precision process equipment
MEGA-FABS 00070-2015-000-01 thermal control module is suitable for semiconductor harsh production lines and is a key component for equipment thermal management