MKS 0190-45963 Acquisition Module  

MKS 0190-45963 is a dedicated signal acquisition module for semiconductor equipment, used for vacuum, flow, and pressure sensing signal acquisition, and is compatible with high-end process equipment main control systems
Product Features:
1. High precision analog-to-digital conversion, small pressure and flow measurement errors, ensuring process consistency
2. Multi channel synchronous acquisition, compatible with various sensors such as MFC and vacuum gauge
3. Built in photoelectric isolation to resist electromagnetic interference caused by radio frequency and motor
4. Equipped with overvoltage, static electricity, and short circuit protection, capable of withstanding instantaneous electrical shocks
5. Slot type board structure, easy to disassemble and replace, single channel faults do not affect each other
Product Parameters:
1. Power supply voltage DC24V
2. Working temperature -10 ℃~+60 ℃
3. Signal input: Multiple analog signals
4. Communication method: Device internal dedicated bus
5. Installation form: board slot type
Application fields:
1. Signal acquisition for semiconductor etching and thin film deposition process equipment
2. Vacuum chamber pressure monitoring system
3. MFC Mass Flow Controller Signal Acquisition Unit
4. Internal data collection of wafer process equipment
5. High end vacuum process supporting industrial control equipment
The MKS 0190-45963 acquisition module has strong stability and is designed specifically for harsh semiconductor operating conditions. It is the core board for signal acquisition in process equipment