MKS 1179A21CR1BV Mass Flow Controller

Model:1179A21CR1BV
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

MKS 1179A21CR1BV Mass Flow Controller

Product manual:

#MKS 1179A21CR1BV Mass Flow Controller

This MKS 1179A21CR1BV quality flow controller is a commonly used spare part in semiconductor equipment for controlling process gas flow.

Product Features

Good zero stability, long-term working flow reading is not easy to drift

Fast gas control response speed, able to quickly adjust gas flow rate

Anti electromagnetic interference, stable operation even under complex working conditions in clean workshops

Equipped with a shut-off valve, it can reliably cut off the gas path when the gas is stopped

Standard 3-inch base, minimal pipeline modifications, easy replacement and installation

Product Specifications

Compatible with multiple process gases

Analog signal communication

Stainless steel sealed gas path

Standard D-type interface

Adapting semiconductor process pipelines to work pressure

Application Areas

Gas flow control of semiconductor etching equipment

Gas supply regulation for thin film deposition process

Replacement of gas path spare parts for wafer process equipment

Accurate gas ratio in vacuum process

Laboratory precision gas control equipment

Overall, this MKS 1179A21CR1BV quality flow controller has precise flow control and easy replacement, making it a commonly used gas control spare part for semiconductor process equipment maintenance.