MKS 253B-31797 throttling butterfly valve    

MKS 253B-31797 throttling butterfly valve
This MKS original exhaust throttle butterfly valve has vacuum chamber pressure regulation and stable maintenance and replacement
Product Features
1 MKS original 253B series, dedicated for semiconductor vacuum equipment
2 motors drive butterfly blades, continuously adjust exhaust flow to stabilize pressure control
3 linear adjustment characteristics, stable pressure control with small fluctuations
4 316L stainless steel valve body, corrosion-resistant and compatible with process gases
5 flange docking installation, matched with MKS pressure controller for use
Product Specifications
Model 253B-31797, type: vacuum exhaust throttle butterfly valve
The full travel switch time is about 1.7 seconds, and the adjustment resolution is high
3. Low leakage rate of valve seat seal, meeting the requirements of vacuum process
Valve body operating temperature: 0 ℃ to 100 ℃, motor -20 ℃ to 40 ℃
5 flange connection method, directly installed in the exhaust pipe of the cavity
Application Areas
Semiconductor etching equipment, vacuum chamber pressure closed-loop control
2 thin film deposition equipment, process vacuum pressure regulation
3 plasma process equipment, exhaust flow control
4. Maintenance of vacuum equipment, replacement of spare parts for faulty throttle butterfly valves
Renovation of Vacuum Units in 5 Old Semiconductor Production Lines
MKS 253B-31797 is a core component for downstream pressure control of vacuum chambers, which regulates exhaust flow to maintain stable chamber pressure. It is a commonly used spare part for semiconductor equipment