MKS 626B11TDE pressure sensor  

MKS 626B11TDE is an MKS Baratron capacitive thin film vacuum pressure gauge, a high-precision absolute pressure sensor for semiconductor equipment, used to monitor the vacuum degree of the cavity and is easy to replace.
Features:

1. The principle of capacitive film measurement is that the measurement results are not affected by the type of gas.
2. Inconel nickel alloy membrane, resistant to process corrosive gases.
3. Fast response speed and sensitive capture of pressure changes.
4. Resistant to pressure impact, not easily damaged by short-term overpressure.
5. Output linear stability to ensure process repeatability.
parameter
6. Full range 10Torr absolute pressure.
7. ± 15V DC power supply, 0-10VDC analog output.
8. NW16 KF vacuum interface, 15 pin D-sub connector.
9. Accuracy ± 0.25% reading, good repeatability.
10. The response time is less than 20ms.
Application:
11. Vacuum monitoring of semiconductor etching chamber.
12. CVD film deposition pressure control.
13. Closed loop control of vacuum process chamber pressure.
14. Replacement of old vacuum pressure gauge spare parts.
15. Pressure measurement of research vacuum equipment.
Summary: MKS 626B11TDE is a commonly used pressure monitoring spare part for semiconductor vacuum processes, with precise and corrosion-resistant measurements.