MKS 631D13T8FH Capacitive Pressure Gauge    

The MKS 631D13T8FH capacitive pressure gauge is a semiconductor device for measuring vacuum chamber pressure, which relies on the principle of capacitive sensing to achieve real-time detection and output of vacuum pressure.
Product Features
1. All metal sensing chamber, resistant to process gas corrosion, suitable for semiconductor process environment
2. High measurement accuracy and good repeatability of pressure detection
3. Temperature compensation design to reduce measurement deviation caused by environmental temperature changes
4. Anti plasma RF interference, suitable for installation near the process chamber
5. Standard flange interface, easy to disassemble and replace on the machine
Product Parameters
1. Power supply 24VDC, allowing ± 10% voltage fluctuation
2. Measurement range: 1000Torr
3. Working temperature 0-50 ℃, suitable for vacuum equipment cabinet working conditions
4. Simulate signal output and provide real-time pressure feedback
5. Built in protection circuit to prevent overload damage to sensing membrane
Application Areas
1. Pressure monitoring of semiconductor vacuum process chamber
2. Vacuum pressure detection of coating and etching equipment
3. Replacement and maintenance of spare parts for vacuum equipment in case of malfunction
4. Measurement unit supporting the pneumatic vacuum control system
5. Renovation and commissioning of second-hand semiconductor vacuum equipment
The MKS 631D13T8FH capacitive pressure gauge has stable detection data, ensuring controllable pressure conditions in vacuum processes