MKS 683B-25580 Digital Exhaust Throttle Valve   

MKS 683B-25580 digital exhaust throttle valve is commonly used in semiconductor vacuum chambers for pressure closed-loop control, and equipment maintenance and replacement are common.
5 product features:
1. The valve body is equipped with a built-in control drive circuit, eliminating the need for an additional independent controller, making assembly effortless
2. Equipped with PID closed-loop regulation, with minimal pressure overshoot and good process repeatability
3. Supports two working modes: pressure and valve plate position, adapted to different process requirements
4. Digital communication has strong anti-interference ability and can read operating status and fault alarm information
5. Butterfly valve linear adjustment, smooth and stable vacuum pressure changes
5 product parameters:
1. DeviceNet digital bus communication
2. Valve action response takes about 1.7 seconds
3. Extremely high valve position resolution of 1/12000
4. Valve body contact material 316L stainless steel, compatible with process gases
5. Support external pressure gauges to achieve closed-loop vacuum control
5 application areas:
1. Vacuum pressure regulation of semiconductor process chamber
2. Exhaust pressure control of etching and thin film deposition equipment
3. Closed loop pressure control of research vacuum equipment
4. Exhaust regulation of special process gas treatment equipment
5. Repair and replacement of spare parts for semiconductor equipment
Among vacuum pressure control spare parts, MKS 683B-25580 is a highly recognized exhaust throttle valve in the industry.