MKS 683B-29016 throttle control valve

Model:683B-29016
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

MKS 683B-29016 throttle control valve

Product manual:

#MKS 683B-29016 throttle control valve

This MKS 683B-29016 throttle control valve is a specialized exhaust throttle valve for semiconductor vacuum equipment, which is often used for equipment maintenance and replacement.

Product Features

Comes with an integrated control module, no need to separately equip a controller

Fast response speed, minimal pressure overshoot, and good process repeatability

Supports DeviceNet communication and can directly access device networks

Excellent sealing performance, low leakage rate after closing

Built in fault diagnosis function, convenient for on-site troubleshooting of valve problems

Product Specifications

Using 316L stainless steel contact medium

Support DeviceNet digital communication

Full travel action time 1.7 seconds

Ultra high subdivision adjustment resolution

Maximum pressure difference of one standard atmospheric pressure

Application Areas

Vacuum pressure control of semiconductor etching chamber

Exhaust regulation of thin film deposition equipment

Replacement of spare parts for wafer process vacuum equipment

Pressure stabilization control of semiconductor process chamber

Pressure regulation of gas path in vacuum coating equipment

Overall, this MKS 683B-29016 throttle control valve has precise pressure regulation and comes with communication control, making it a commonly used original valve spare part for semiconductor vacuum process maintenance.