MKS 901P-11130-0167 Vacuum Pressure Sensor

MKS 901P-11130-0167 vacuum pressure sensor, Pirani vacuum gauge, used to monitor the vacuum degree inside the chamber and output corresponding pressure signals to the machine master control.
Product Features
1. Wide measurement range, stable detection performance in high and low vacuum intervals
2. Anti gas pollution, suitable for semiconductor process gas environment
3. Direct output of analog signals, convenient for the system to read pressure values
4. Small body structure, small space for easy installation of the machine
5. Equipped with status feedback, faults can be quickly identified and judged
Product Specifications
1. Power supply 24VDC
2. Vacuum measurement range
3. Working temperature 0-60 ℃ Clean room working conditions
4. Analog signal output interface
5. Standard vacuum flange installation interface
Application Areas
1. Real time monitoring of semiconductor vacuum chamber pressure
2. Vacuum degree detection inside the coating equipment chamber
3. Vacuum pressure collection of etching equipment gas path
4. Vacuum process equipment pressure feedback unit
5. Maintenance and replacement of spare parts for MKS vacuum equipment
During the maintenance and replacement of the vacuum system, MKS 901P-11130-0167 can accurately provide real-time feedback on the vacuum pressure status of the chamber.