MKS 925-11004-0087 Sensor

The MKS 925-11004-0087 sensor is a MKS micro Pirani vacuum pressure sensor used to monitor the vacuum degree of pipelines, and is easy to install.
Features:

1. MEMS sensing chip, good shock resistance, not afraid of sudden air intake impact.
2. Wide pressure measurement range, capable of measuring from low vacuum to atmospheric pressure.
3. Analog+digital dual signal output, convenient for docking with control systems.
4. Equipped with a set point relay, it can directly link valves and pump bodies.
5. Installation is not limited by angle, and measuring in any direction does not affect accuracy.
parameter
6. Powered by 9-30V DC, with low power consumption.
7. Measure the range from 1 × 10 ⁻⁵ Torr to atmospheric pressure.
8. 304 stainless steel contact material, low air release.
9. Supports RS232 digital communication and 16 bit analog output.
10. Possess CE certification and comply with industrial standards.
Application:
11. Vacuum monitoring of the front-end pipeline of semiconductor equipment.
12. Vacuum pressure testing of thin film coating equipment.
13. Pressure monitoring of vacuum pump roughing circuit.
14. Vacuum chamber inflation pressure control.
15. Replacement of spare parts for old vacuum equipment sensors.
Summary: MKS 925-11004-0087 has a wide range and strong stability, and is a commonly used pressure monitoring spare part for semiconductor vacuum production lines.