Details
MKS AS00497-AB Communication Module
Product manual:
MKS AS00497-AB semiconductor equipment dedicated communication card, compatible with AMAT vacuum flow valve system, stable transmission, features as follows:
1. MKS AS00497-AB standard rack card insertion, direct insertion and replacement
2. Dedicated bus docking flowmeter, throttle valve and equipment master control
3. Signal electrical isolation to resist cavity RF electromagnetic interference
4. Integrated hardware protection against overcurrent, static electricity, and surge
5. Multi channel collection of pressure and valve opening process data
6. Support industrial control standard communication protocol, remote read and write parameters
7. Panel LED indicator light, quickly locate communication and power supply faults
8. Gold plated backplate contacts, not easily oxidized after long-term use in dust-free workshops
9. Industrial PCB copper plating for heat dissipation, capable of continuous operation for 7 × 24 hours
10. Built in hardware self-test, power on verification of all signal channels
11. Partition the wiring of strong and weak electrical lines to avoid signal crosstalk
12. 24V DC power supply, suitable for small fluctuations in workshop voltage
13. Large capacity cache, no loss or delay in process data transmission
14. Standardized wiring ports, no need to modify existing cables for replacement
15. Supporting application materials: wafer etching and deposition vacuum equipment
ending
MKS AS00497-AB integrated data acquisition and communication, anti-interference and durable, dedicated communication module for semiconductor vacuum valve control system.
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AS00497-AB
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